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RAMANdrive
Bruker / IR and Raman microscopy

RAMANdrive

Raman and 325 nm photoluminescence for complete 300 mm semiconductor wafers and inspection coordinates.

RAMANdrive accepts 300 mm wafers on a 300 × 300 mm stage, acquires 400 spectra per pulse and supports dark-field and AreaFlash.

RAMANdrive Wafer Analysis System is Nanophoton/Bruker's semiconductor-focused Raman microscope. Its 300 × 300 × 35 mm stage holds whole 300 mm wafers with vacuum channels and locating pins. Defect coordinates from inspection equipment can be imported so the system automatically moves to each target.

A 325 nm UV laser supports photoluminescence mapping of defects, impurities, gallium distribution in GaN and InGaN quantum dots. A dark-field objective, unique in the range, detects particles below 100 nm. Line illumination records 400 spectra per pulse, while AreaFlash expands the beam for rapid large-area surveys. Confocal depth profiling maps stress in SiC/GaN and SiC polytypes.

Spectral resolution is better than 1.2 cm⁻¹, peak-position accuracy 0.1 cm⁻¹, and range starts at 100 cm⁻¹ (optional 50). Spatial resolution is 350 nm X, 500 nm Y and 1 µm Z with a 100×/0.90 NA objective. A 550 mm spectrometer, up to three gratings, cooled 1340 × 400 CCD and lasers from 325 to 785 nm support different tasks. The system weighs 390 kg including the vibration-isolation table.

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